发明名称 Adhesive system for supporting thin silicon wafer
摘要 In some embodiments, an adhesive system for supporting thin silicon wafer is presented. In this regard, a method is introduced to bond a silicon wafer to a translucent carrier through the use of an adhesive. Other embodiments are also disclosed and claimed.
申请公布号 US2007077728(A1) 申请公布日期 2007.04.05
申请号 US20050241499 申请日期 2005.09.30
申请人 KULKARNI SUDHAKAR N;ARANA LEONEL R;PRACK EDWARD R 发明人 KULKARNI SUDHAKAR N.;ARANA LEONEL R.;PRACK EDWARD R.
分类号 H01L21/30;H01L21/46 主分类号 H01L21/30
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