Vorrichtung und Verfahren für Hochgeschwindigkeitsröntgeninspektion

摘要

An apparatusÄ10Ü and method for inspecting partsÄ20Ü. The apparatusÄ10Ü includes an x-ray sourceÄ11-13Ü for illuminating a partÄ20Ü from a plurality of locations with respect to the partÄ20Ü and an imaging detectorÄ14Ü for forming a plurality of measured x-ray images of the partÄ20Ü, one such measured x-ray image corresponding to each of the illumination locations. A controllerÄ50Ü compares each of the measured x-ray images with a corresponding calibration image. The controllerÄ50Ü provides a defective partÄ20Ü indication if one of the measured x-ray images differs from the corresponding calibration image by more than a threshold value in partÄ20Ü of the measured x-ray image. The controllerÄ50Ü localizes defects on the partÄ20Ü by comparing two or more of the measured x-ray images with two or more corresponding calibration images. The calibration images can be constructed from measured images of defect free partsÄ20Ü.