| 摘要 |
PROBLEM TO BE SOLVED: To provide a process of making a semiconductor lens that can easily form the semiconductor lens in an arbitrary shape. SOLUTION: The process of making the semiconductor lens composed of a silicon lens by partly removing the semiconductor substrate 10 of a p-type silicon substrate includes an anode forming step of forming a plurality of anodes 12a, 12b, and 12c pattern-designed according to the desired lens shape on one surface side of the semiconductor substrate 10, an anodizing step of arranging a cathode 25 opposite on the other surface side of the semiconductor substrate 10 and controlling currents flowing from a current source 31 to the respective anodes 12a, 12b, and 12c respectively to form a porous part 14 corresponding to the lens shape, and a porous part removing step of removing the porous part 14. COPYRIGHT: (C)2007,JPO&INPIT
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