A support structure extends upwards from a substrate and supports a tiltable platform, the upper surface of which can be a mirror, by means of spaced flexible couplings that enable the platform to tilt relative to the support structure . Respective electrodes associated with the substrate and the platform control the platform tilt in response to applied signals. The platform electrodes are spaced below and tilt with the platform, with the platform extending laterally from the support structure further than the platform electrodes. The platform is bulk micromachined, and the support structure surface micromachined.
