| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrier which can cover an edge of the substrate uniformly and with appropriate thickness. SOLUTION: The present invention relates to the substrate carrier in which at least its one part comprises the material having higher coefficient of thermal expansion than that of the substrate. A center part of the web is fixed on the substrate carrier, so that edge coating of the substrate does not become uneven or at least uneven edge coating can be reduced especially during sputtering. The web has a smaller coefficient of thermal expansion than that of the region of the substrate carrier where the web is fixed. COPYRIGHT: (C)2007,JPO&INPIT |
