| 摘要 |
PROBLEM TO BE SOLVED: To obtain a tomographic image at a high speed in a confocal microscope apparatus using OCT measurement. SOLUTION: In the confocal microscope apparatus where reflected light L3 from an object S to be measured and reference light L2 are coupled, and the interference light L4 is detected by an interference light detecting means 6, then, the tomographic image of the object S is obtained, an optical modulation part 20 for carrying out the frequency modulation of the reference light L2 is provided. The optical modulation part 20 includes: a diffraction grating element 22 for making the reference light L2 the spectral one; a collimator lens 23 for making the spectral reference light L2 the collimated light beams; a reflection mirror 24 for reflecting the reference light transmitted through the collimator lens 23 toward the collimator lens 23 again, which is arranged so that the center of the mirror 24 may be deviated from the optical axis of the collimator lens 23. COPYRIGHT: (C)2007,JPO&INPIT
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