| 摘要 |
PROBLEM TO BE SOLVED: To provide an interference fringe analytical method and an aberration measuring method capable of coping quickly with modulation of a space carrier at low cost, in a spatial phase shift method for a multiwavelength interferometer. SOLUTION: This method is provided with a tilt interference fringe setting step, a tilt interference fringe forming step superposed with the space carrier, a tilt interference fringe alignment step for carrying out alignment to make a frequency set in the tilt interference fringe setting step equal to a frequency of a tilt interference fringe formed in the tilt interference fringe forming step, a tilt interference fringe frequency calculating step for calculating the frequency of the tilt interference fringe for an interference fringe analyzing parameter, in response to a changed light source wavelength, when the light source wavelength of the interferometer is changed, and an interference fringe analytical step for interference-fringe-analyzing the tilt interference fringe formed in the tilt interference fringe forming step, using the frequency of the tilt interference calculated in the tilt interference fringe frequency calculating step, when the light source wavelength of the interferometer is changed. COPYRIGHT: (C)2007,JPO&INPIT
|
