| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for measuring three-dimensional shape by a lattice pattern projection method, capable of inexpensively reducing the shadows caused an object to be measured and improving the measurement accuracy. SOLUTION: A lattice pattern image formed by an optical modulation element 605, having a lattice pattern 604 irradiated with light from a light source device 8 is projected to a specimen 3 at a prescribed angle. The angle of inclination of the lattice pattern image can be altered by a projection angle switching part 615. COPYRIGHT: (C)2007,JPO&INPIT
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