| 摘要 |
PROBLEM TO BE SOLVED: To provide an ionizing fan filter unit capable of enhancing product yield and productivity by preventing problems caused by electrostatic discharge (ESD) and fine dust in a clean room of a semiconductor plant, an LCD plant, or the like. SOLUTION: The ionizing fan filter unit is integrally composed of a fan motor 24 driven by the control of a fan motor control part 12 and installed to expose a part thereof to an upper case; an ion generating part 11 generating ion for eliminating static electricity by corona discharge with high voltage applied by selecting an ion output method, and emitting the ion into air sucked by the fan motor 24; and a filtering means installed in a lower case to filter air sucked by the fan motor 24 and to diffuse ion generated from the ion generating part 11, into filtered air. COPYRIGHT: (C)2007,JPO&INPIT
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