发明名称 Laser irradiation method and laser irradiation apparatus
摘要 An object of the present invention is to provide a laser irradiation method and a laser irradiation apparatus for irradiating an irradiation surface with a linear beam having more homogeneous intensity by blocking a low-intensity part of the linear beam without forming the fringes due to the diffraction on the irradiation surface. In the laser irradiation, a laser beam emitted from a laseroscillator 101 passes through a slit 102 so as to block a low-intensity part of the laser beam, the traveling direction of the laser beam is bent by a mirror 103, and an image formed at the slit is projected to an irradiation surface 106 by a convex cylindrical lens 104 .
申请公布号 US2007077696(A1) 申请公布日期 2007.04.05
申请号 US20050582013 申请日期 2005.03.24
申请人 发明人 TANAKA KOICHIRO;YAMAMOTO YOSHIAKI
分类号 H01L21/84;B23K26/00;B23K26/073;H01L21/00;H01L21/20;H01L21/268;H01L21/336;H01L21/77;H01L29/786 主分类号 H01L21/84
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