| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multilayer piezoelectric body which suppresses the variation in displacement and deterioration of driving characteristics among a plurality of displacement regions or a plurality of displacement elements formed on the surface thereof. <P>SOLUTION: The multilayer piezoelectric body includes a plurality of surface electrodes formed on the surface of a laminate made by stacking a piezoelectric ceramic layer and an internal electrode layer, the displacement regions so formed on the surface of the laminate as to correspond to the individual surface electrodes, and non-displacement regions so formed as to surround the displacement regions. Piezoelectric ceramic crystal grains which constitute the piezoelectric ceramic layer have an average crystal grain diameter of 1.2-1.8 μm, and 80% or above of the piezoelectric ceramic crystal grains have a crystal grain diameter which is within ±15% of the average crystal grain diameter. <P>COPYRIGHT: (C)2007,JPO&INPIT |
