| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multilayer reflector capable of absorbing an exciting light before arrival thereat which is not needed for the exposure, and causes the reflector forming a projection optical system to be thermally expanded. <P>SOLUTION: An exposing light reflective film 2 is formed on a quartz board 1 with an exciting light antireflective film 3 formed thereon. The exciting light having a long wavelength is absorbed by an exciting light antireflective part laid on the front side to reduce the exciting light reflection low, while the exposing light having a short wavelength transmits through the exciting light antireflective part to arrive at an exciting light reflective part to reflect it. <P>COPYRIGHT: (C)2007,JPO&INPIT |
