| 摘要 |
PROBLEM TO BE SOLVED: To form a test pattern by measuring the distance between intended figures or the like so as to be easily obtained with less operations. SOLUTION: In the test pattern editing device for displaying a dimension line from a reference pattern to a target pattern in a layout verification pattern, when a measuring position in the reference pattern is designated, an actual measuring position is selected based on the relative position relation of the designated measuring position in the reference pattern, a shape of the target pattern adjacent to the selected measuring position is acquired, the dimension between the acquired dimension measuring object and the selected measuring position is measured, and the dimension line and dimensional value of the measured dimension are displayed. COPYRIGHT: (C)2007,JPO&INPIT
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