METHOD AND TARGET-SUBSTRATE ARRANGEMENT FOR BUILDING A HOMO- GENEOUS COATING OF UNIFORM THICKNESS ON THE SUBSTRATE FROM A PLASMA PRODUCED BY A PULSED LASER

摘要

The invention relates to a method for building a homogeneous coating of uniform layer thickness on a substrate (34) from a plasma produced by a pulsed laser from a target (32), comprising the steps of forming the target (32) with an ablation portion (33) making up at least a part of the surface area of the target (32) and forming the substrate (34) with a deposition surface (35) making up at least a part of the surface area of the substrate (34); arranging the target (32) and the substrate (34) in a controlled atmosphere; and exposing the target (32) on at least a part of its ablation portion (33) to laser beam pulses, whereby producing a plasma plume (24) from the target (32). The method according to the invention further comprises the steps of arranging the deposition surface (35) in a closed half space located on that side of a tangent plane laid through the ablated part of the ablation portion (33) of the target (32) which is opposite to the plasma plume (24) in such a position, wherein a normal to the deposition surface (35) has a vector com- ponent being parallel and unidirectional with the normal to the ablated part of the ablation portion (33) of the target (32); simultaneously with the ablation, continuously rotating the deposition surface (35) around a rotational axis parallel with the normal to the deposition surface (35), while utilizing those constituents of the plasma plume (24) for building the coating on the deposition surface (35) that also have velocity components pointing into the opposite direction relative to the normal to the ablated part of the ablation portion (33) of the target (32).