| 摘要 |
<p>For logging data acquisition in a device such as a substrate treatment device, it is possible to acquire accurate data on a predictive phenomenon before generation of an alarm. In a data recording method, a difference between the maximum value and the minimum value of the acquired data is obtained. If the difference is equal to or above a predetermined value, a first portion of the acquired data is stored. If the difference is below the predetermined value, a second portion contained in the first portion of the acquired data is stored.</p> |
