| 摘要 |
PROBLEM TO BE SOLVED: To measure aberration of an optical system to be inspected at low cost, even if a mirror surface of a light reflecting means is required to be faced downward. SOLUTION: This Hartmann sensor is equipped with a plane mirror unit 30 for reflecting a light flux to be inspected passing the optical system to be inspected (telescope 80) on the approximately same optical path as the case at the incidence time, a CCD imaging device 16 for detecting the light flux to be inspected reflected by the plane mirror unit 30 and passing the optical system to be inspected in the opposite direction to the case at the incidence time, and an operation device 18 for calculating the aberration of the optical system to be inspected based on the light flux to be inspected detected by the CCD imaging device 16. The sensor has a constitution wherein the light flux to be inspected is converted into a plurality of small light fluxes by a microlens array 15 provided between the optical system to be inspected and the CCD imaging device 16, and the CCD imaging device 16 detects the light flux to be inspected as the plurality of small light fluxes. The plane mirror unit 30 has a constitution wherein a plurality of plane mirrors 55 having respectively a smaller diameter than an effective diameter of the optical system to be inspected are aligned in the direction orthogonal to the optical axis of the optical system to be inspected. COPYRIGHT: (C)2007,JPO&INPIT
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