| 摘要 |
PROBLEM TO BE SOLVED: To provide a new organometallic precursor substance easily splittable even without the reaction with any oxidizing agent, and to provide a method for producing metallic thin film utilizing the same. SOLUTION: The new organometallic precursor substance has such a structure that either one series substance, as an organic molecule having an unshared electron pair, selected from the group consisting of ethers, amines, THF, phosphine series and phosphite salt series is coordinate-bonded to Ru(DMPD)<SB>2</SB>or Ir(DMPD)<SB>2</SB>. [DMPD:dimethylpentadienyl]. COPYRIGHT: (C)2007,JPO&INPIT
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