发明名称 |
CAPACITIVE RF-MEMS DEVICE WITH INTEGRATED DECOUPLING CAPACITOR |
摘要 |
The present invention provides a capacitive RF-MEMS device comprising a vertically integrated decoupling capacitor (14). The decoupling capacitor (14) therefore does not take extra area. Furthermore, the RF-MEMS according to the invention needs less interconnects, which also saves space and which reduces the series inductance/resistance in the RF path. |
申请公布号 |
WO2006117709(A3) |
申请公布日期 |
2007.04.05 |
申请号 |
WO2006IB51247 |
申请日期 |
2006.04.21 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N. V.;STEENEKEN, PETER, GERARD |
发明人 |
STEENEKEN, PETER, GERARD |
分类号 |
H01H59/00 |
主分类号 |
H01H59/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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