| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe unit having high dimensional precision of conduction wires which are prevented removal from a substrate, and to provide a conduction inspection method using the probe unit and its manufacturing method. SOLUTION: The probe unit includes a substrate consisting of crystalized glass of which at least a part is crystalized and conduction wires formed on the substrate. Since the thermal expansion coefficient of the substrate becomes small due to crystalizing of the glass, stability in dimension of the conduction wires is raised by forming the conduction wires on the crystalized glass so that removal of the conduction wires from substrate can be prevented. As it is easy to raise the flatness of the surface of the crystalized glass, the dimensional precision of the conduction wires can be raised. COPYRIGHT: (C)2007,JPO&INPIT
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