| 摘要 |
PROBLEM TO BE SOLVED: To prevent propagation of error of view field position of cameras A to C, due to the motion error of the cameras A to C and attitude variations in the cameras A to C on the position measurement results, when position of the measuring object on the substrate 12 is measured. SOLUTION: The measuring object position on the substrate 12 is photographed with cameras A to C, and a reference scale 13 on the substrate 12 is photographed with the cameras A to C by moving only a table 5 in y-direction, without moving the cameras A to C when photographed, as it is. The moving quantity of the table 5 in the moving is measured with a linear encoder; and by using the image of the obtained measurement object position, the image of the reference scale 13 and the moving quantity of the table 5, the position of the measuring object is obtained. COPYRIGHT: (C)2007,JPO&INPIT
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