发明名称 METHOD OF MANUFACTURING FILM, METHOD OF MANUFACTURING DEVICE, DEVICE, ELECTROOPTICAL DEVICE AND ELECTRONIC EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a film capable of improving uniformity of the film by reducing film thickness irregularity, to provide a method of manufacturing an electrooptical device, and to provide the electrooptical device and electronic equipment. SOLUTION: A material solution 26 of a hole injection layer, material solutions 27R, 27G and 27B of luminescent layers, a material solution 28 of an electron injection layer and a solvent solution 52 for film thickness adjustment are applied to element formation areas 10 of an organic EL display by superposing them on one another and dried. The solutions are selected such that the material solution 26 of a hole injection layer and the material solutions 27R, 27G and 27B of luminescent layers are incompatible with each other, the material solutions 27R, 27G and 27B of luminescent layers and the material solution 28 of an electron injection layer are incompatible with each other, and the material solution 28 of an electron injection layer and the solvent solution 52 for film thickness adjustment are incompatible with each other. Since the respective material solutions applied by being superposed on one another are incompatible with one another, they are dried in a flat form and each film is formed. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007087619(A) 申请公布日期 2007.04.05
申请号 JP20050271483 申请日期 2005.09.20
申请人 SEIKO EPSON CORP 发明人 ISHIDA KOHEI
分类号 H05B33/10;H01L51/50 主分类号 H05B33/10
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