发明名称 DUAL SACRA ARM
摘要 A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.
申请公布号 WO2005123565(A3) 申请公布日期 2007.04.05
申请号 WO2005US20304 申请日期 2005.06.09
申请人 BROOKS AUTOMATION, INC. 发明人 PIETRANTONIO, ANTONIO, F.;CHESNA, ANTHONY;ALMALI, HAKAN;GILCHRIST, ULYSSES
分类号 B25J18/04;B25J9/04;B66C23/00 主分类号 B25J18/04
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