| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new silicone copolymer having good transmissivity for short wavelength exposure like ArF exposure, and is suitable as an intermediate layer material for use in microprocessing. <P>SOLUTION: The silicone copolymer comprises (A) a silsesquioxane unit containing an oxetanyl group and (B) a silsesquioxane unit containing a hydrocarbon group. <P>COPYRIGHT: (C)2007,JPO&INPIT |
