OPTICAL MEASUREMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an optical measurement system which measures a two-dimensional distribution of a spectroscopic characteristic while automatically controlling the focus of an optical system without substantially decaying light quantity from a measurement region when measuring the spectroscopic characteristic of a measurement part.

SOLUTION: The optical measurement system provided with a first optical instrument and a second optical instrument comprises: a first light path which guides a first light ray from the measurement part to the first optical instrument; a second light path which guides a second light ray from the measurement part to the second optical instrument; the optical system which allows the first light path and the second light path to pass therethrough and are disposed so that the first and second light paths become paraxial to each other; a reflection region for changing the direction of the first light path, which is crossed by the second light path; and a transmissive region which is disposed on the crossing position between the reflection region and the second light path and has a light transmittance higher than that of the reflection region.

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