ELECTRONIC COMPONENT ELECTRIC CHARACTERISTIC MEASURING METHOD

摘要

[PROBLEMS] An electronic component electric characteristic measuring method for measuring an electric characteristic of a single object to be measured with high accuracy. [MEANS FOR SOLVING PROBLEMS] An object (22) is connected in series between calibration surfaces of a flat transmission line, and an electric characteristic of the object to the calibration surface the measurement error of which is corrected by an error correcting method using the flat transmission channel as a calibration reference is measured. The electric characteristic of when the flat transmission channel is open is measured. By using a distributed constant error model, the electric characteristic of the object (22) is corrected by using the electric characteristic of when the flat transmission channel is open. A through chip (23) given a value is connected in series between the calibration surface of the flat transmission channel, and the electric characteristic of the through chip to the calibration surface the measurement error of which is corrected by an error correcting method using the flat transmission channel as a calibration reference is measured. By using a distributed constant error model, the electric characteristic of the through chip (23) is corrected by using the electric characteristic of when the flat transmission channel is open. By using a distributed constant error model, the electric characteristic of the object is corrected by using the electric characteristic of the through chip so as to determine the electric characteristic of the single object.