| 摘要 |
PROBLEM TO BE SOLVED: To provide an air conditioner supplying weak to strong air of highly stable temperature and reducing vibration applied to precision equipment. SOLUTION: The typical constitution of the air conditioner comprises a heat exchanging liquid tank 40 of a secondary refrigerant with an evaporator 22 of a refrigerator 20; an air-cooled coil 42 connected to the liquid tank 40 and circulating the secondary refrigerant; and a heating means 43 for heating the secondary refrigerant. COPYRIGHT: (C)2007,JPO&INPIT
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