| 摘要 |
A method of manufacturing a semiconductor device including forming a trench on a first surface of a silicon substrate, forming a thermal oxide layer and a deposited oxide layer on the trench and the silicon substrate, planarizing a second surface of the silicon substrate by a chemical mechanical polishing (CMP) process, and forming a transistor on the second surface of the silicon substrate. The semiconductor device and the method of manufacturing the same provide an SOI device that has low resistance of the source/drain regions and suppress a short channel effect.
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