| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an instrument for measuring a film thickness of a transparent colored film, capable of recognizing easily the transparent colored film even by only reflection illumination, and capable of precluding the measured transparent colored film from being recognized erroneously, when measuring noncontactly the film thickness of the transparent colored film by a spectral interference method. SOLUTION: In this method of measuring the film thickness of the transparent colored film, illumination light is made to get incident into on a surface of a measured object with the transparent colored film formed on a substrate, reflected light thereof is dispersed spectrally to find a spectral reflectance, and the film thickness of the transparent colored film is calculated, based on a spectral interference waveform. The illumination light is made to get incident into the measured object, and a focal point position is moved from a film surface to a substrate reverse face under an incident condition to specify the measured transparent colored film, in the method. COPYRIGHT: (C)2007,JPO&INPIT
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