摘要 |
PROBLEM TO BE SOLVED: To allow a measuring object material to efficiently absorb laser light, to properly apply also to a particle having a nano-order particle size, and to simultaneously measure a plurality of components. SOLUTION: In this particle component measuring method, a filament 14 generated by irradiating ultrashort pulsed laser beam 15 is irradiated to particles, such as nanoparticles or microparticles to generate a plasma, and a particle component is measured based on the emission spectrum from the plasma. COPYRIGHT: (C)2007,JPO&INPIT
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