| 摘要 |
PROBLEM TO BE SOLVED: To obtain high output by efficiently generating deep ultraviolet laser light having a wavelength in a deep ultraviolet range. SOLUTION: In a method of generating deep wavelength laser light that generates a fourth higher harmonic of laser light having a wavelength in a 1μm band, generating laser light through sum frequency generation of the fourth higher harmonic and laser light having a wavelength in a 1.4 to 1.5μm band, and generates laser light of≤200 nm in wavelength through sum frequency generation of the laser light generated through the sum frequency generation and the laser light having the wavelength in the 1.4 to 1.5μm band, laser light of 193.3 to 193.5 nm in wavelength is generated as the laser light of≤200 nm in wavelength, where the 1μm band ranges from 1,063 to 1,065 nm and the 1.4 to 1.5μm band ranges from 1,410 to 1,424 nm. COPYRIGHT: (C)2007,JPO&INPIT |
