| 摘要 |
PROBLEM TO BE SOLVED: To obtain high output by efficiently emitting deep ultraviolet laser light having a wavelength in the deep ultraviolet range. SOLUTION: Laser light having a wavelength of about 227 nm is obtained by sum frequency mixing of a fourth higher harmonic of laser light obtained by amplifying semiconductor laser light having a wavelength of 1,064.0 to 1,065.0 nm by an optical fiber amplifier and laser light obtained by amplifying semiconductor laser light having a wavelength of 1,557.0 to 1,571.0 nm by an optical fiber amplifier. Further, laser light having a wavelength of 198.4 to 198.7 nm is obtained by sum frequency mixing of this laser light and the laser light having the wavelength of 1,557.0 to 1,571.0 nm. COPYRIGHT: (C)2007,JPO&INPIT |
