| 摘要 |
PROBLEM TO BE SOLVED: To prevent cycle time from extending by gradually increasing the processing time due to the time degradation of slurry caused by wear of abrasive grains or mixing of measurement oil in a fluid polishing. SOLUTION: The fluid polishing method comprises a plurality of processing steps, in which fine holes on a workpiece are polished by supplying the slurry (7) of polishing fluid to the workpiece (5) with supply devices (2a, 2b). The operating fluid flow rates (Q1, Q2) of before and after processing are measured, and the slurry is supplied to the workpiece during a predetermined processing time (T). The predetermined processing time is determined by a processing ability coefficient (K) defined as the ratio (dQ/T) of the increasing amount (dQ=Q2-Q1) between the operating fluid flow rates before and after processing to the processing time (T). The processing ability coefficient (K) is determined based on the data of the past in the fluid polishing, and when the processing ability coefficient becomes less than the predetermined threshold (a), the processing pressure is increased or the slurry is added/renewed. COPYRIGHT: (C)2007,JPO&INPIT |
