| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a solid-state imaging device capable of enlarging the dimension of an in-layer lens by forming the lens in self align for the base, and to provide the solid-state imaging device and a camera. SOLUTION: The manufacturing method of a solid-state imaging device has a process of forming a photoelectric conversion element 21 and an active element 22 on a substrate 20; a process of repeatedly forming wiring layers M1, M2 and cap layers 26, 29 on an upper layer of the substrate 20; a process of eliminating a layer to the lowermost cap layer 26 in a region of the photoelectric conversion layer 21 to form a lens embedding portion 30; a process of covering the surface of the lens embedding portion 30 to form a lens shape adjusting film 31 for adjusting the shape of the lens embedding portion 30; and a process of embedding a lens material into a lens embedding portion 30a having the shape adjusted by the adjusting film 31. COPYRIGHT: (C)2007,JPO&INPIT
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