| 摘要 |
The self-aligned Schottky-barrier clamped trench DMOS transistor structure of the present invention comprises a Schottky-barrier diode being formed in a middle semiconductor portion of a self-aligned source region. The self-aligned source region comprises a lightly-doped epitaxial semiconductor layer, a moderately-doped base diffusion ring being formed in a surface portion of the lightly-doped epitaxial semiconductor layer surrounded by a trench gate region, a heavily-doped source diffusion ring being formed in a side surface portion of the moderately-doped base diffusion ring, and a self-aligned source contact being formed on a semiconductor surface of the self-aligned source region surrounded by a sidewall dielectric spacer. The trench gate region comprises a self-aligned conductive gate layer being formed over a gate dielectric layer lined over a trenched semiconductor surface in a shallow trench with or without a thicker isolation dielectric layer being formed on a bottom surface of the shallow trench.
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