JIG FOR POLISHING DISC-LIKE MEMBER, METHOD FOR POLISHING REAR SURFACE OF DISC-LIKE MEMBER AND MACHINE FOR POLISHING REAR SURFACE OF DISC-LIKE MEMBER
摘要
<p>A rear surface (non-recording surface) of a stamper (disc-like member) is polished in noncontact state with a recording surface of the stamper (disc-like member). A polishing jig (10) of the stamper (disc-like member) is provided with an annular section (11) surrounding the circumference of the stamper (1) a rear surface of which is placed on a lapping plate (32); a cover section (14) covering an upper part of the annular section; and a pressurized fluid introducing section (16), which is arranged at the center of the cover section and introduces a pressurized fluid into a chamber (15) formed by the annular section and the cover section. A rear surface polishing machine for the stamper (disc-like member) is provided with the lapping plate, the polishing jig, and a regulating member which regulates the polishing jig not to shift in a rotating direction of the lapping plate.</p>
