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发明名称
Interferometrische Messvorrichtung zur Wellenlängenkalibrierung
摘要
申请公布号
DE10131898(B4)
申请公布日期
2007.04.05
申请号
DE20011031898
申请日期
2001.07.04
申请人
LEICA MICROSYSTEMS SEMICONDUCTOR GMBH
发明人
RINN, KLAUS;KACZYNSKI, ULRICH
分类号
G01B9/04;G01J9/02;G01B9/02;G01B11/00;G01B11/03
主分类号
G01B9/04
代理机构
代理人
主权项
地址
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