| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming an exact thin film pattern by preventing a plastic substrate from being thermally deformed. SOLUTION: The method of manufacturing the display panel includes steps for: forming a flexible substrate, forming a gate line on the substrate, depositing a gate insulating layer on the substrate, forming a semiconductor layer on the gate insulating layer, forming a data line and a drain electrode on the semiconductor layer, and forming a pixel electrode that is electrically connected to the drain electrode. At least the method includes steps of: one of the forming of the gate line, the depositing of the gate insulating layer, the forming of the semiconductor layer, the forming of the drain electrode and the data line including the source electrode, and the forming of the pixel electrode includes sputtering at a temperature of between about 80°C to about 150°C and between about 1x10<SP>-6</SP>to about 9x10<SP>-6</SP>Torr of vacuum. COPYRIGHT: (C)2007,JPO&INPIT |
