| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveyance system for improved conveyance efficiency of substrates. SOLUTION: A substrate conveyance system E comprises a stocker 10 for storing a wafer, a prober 2 as a plurality of inspection devices, and an RGV3 which moves between the stocker 10 and the prober 2 to convey a wafer. The stocker 10 comprises a buffer B as a delivery part for wafers. The prober 2 comprises an adapter unit 25 as a delivery part for wafers. The RGV3 places wafers. The buffer B carries a wafer out of the adapter unit 25, and the buffer B comprises a carrier arm 341 for carrying a wafer into the adapter unit 25. The RGV3 moves while the carrier arm 341 holds the wafer. COPYRIGHT: (C)2007,JPO&INPIT
|
