发明名称 Electrostatic deflector
摘要 There is disclosed an electrostatic deflector having four pillar-like identical electrodes spaced from each other by 90°. An even number of pillar-like electrodes are disposed in each space between the four electrodes. Spaces are formed on both sides of each one of the first electrodes and have bent portions. The even number of electrodes are arranged symmetrically relative to a third or fourth vertical plane including an axis spaced from the X-axis by 45° or -45°, respectively. Holes are formed across each of the third and fourth vertical planes. Rod-like members are inserted in the holes.
申请公布号 US2007075258(A1) 申请公布日期 2007.04.05
申请号 US20060528942 申请日期 2006.09.28
申请人 JEOL LTD. 发明人 GOTO KAZUYA
分类号 H01J37/147 主分类号 H01J37/147
代理机构 代理人
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