Ferrite substrate for thin-film inductors, thin-film common mode filter using the substrate, thin-film common mode filter array using the substrate and manufacturing method of the substrate

摘要

A ferrite substrate for thin-film inductors is provided by means of blending raw materials to meet a composition of di-iron trioxide (Fe₂O₃): 40 to 55 molt %, nickel oxide (NiO): 5 to 35 molt, zinc oxide (ZnO): 10 to 40 molt %, and bismuth trioxide (Bi₂O₃): 150 to 750 ppm, or of Fe₂O₃: 40 to 55 molt %, NiO: 5 to 35 mol %, ZnO: 10 to 40 mol %, cupric oxide (CuO): 5 to 10 molt, and manganese dioxide (MnO₂): 0.5 to 2 molt %, and then molding and sintering the blended material, and applying hot isostatic pressing to the sintered article. A thin-film common mode filter and a thin-film common mode filter array using the ferrite substrate and the manufacturing method of the substrate are also provided.