发明名称 METHOD FOR PRODUCING GROUP 3-5 NITRIDE SEMICONDUCTOR AND METHOD FOR MANUFACTURING LIGHT-EMITTING DEVICE
摘要 <p>Disclosed are a method for producing a group 3-5 nitride semiconductor and a method for manufacturing a light-emitting device. The method for producing a group 3-5 nitride semiconductor comprises the steps (i), (ii) and (iii) described below in this order. The method for manufacturing a light-emitting device comprises the steps (i), (ii), (iii) and (iv) described below in this order. The steps are (i) a step for arranging inorganic particles on a substrate; (ii) a step for growing a semiconductor layer; (iii) a step for separating the semiconductor layer from the substrate by irradiating light between the substrate and the semiconductor layer; and (iv) a step for forming an electrode.</p>
申请公布号 WO2007037504(A1) 申请公布日期 2007.04.05
申请号 WO2006JP319822 申请日期 2006.09.27
申请人 SUMITOMO CHEMICAL COMPANY, LIMITED;YAMANAKA, SADANORI;UEDA, KAZUMASA;TSUCHIDA, YOSHIHIKO 发明人 YAMANAKA, SADANORI;UEDA, KAZUMASA;TSUCHIDA, YOSHIHIKO
分类号 C23C16/34;H01L21/20;H01L21/205;H01L33/00 主分类号 C23C16/34
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