WIRING FOR MICROMIRROR ARRAY LENS

摘要

A mircromirror array lens includes a micromirror (301) lying in a micromirror layer, an electrode (302) configured to displace the micromirror by electrostatic force, and a control wire (303) coupled to the electrode and configured to supply voltage to the electrode to generate electrostatic force. In one embodiment, the control wire lies in a gap between the micromirror and another micromirror in the micromirror layer. In another embodiment, the control wires lie beneath the micromirror layer, such that the fill-factor of the micromirror array lens is optimized. In another embodiment, the micromirror array lens includes a passivation layer (405) configured to provide electrical isolation between the electrode and the control wire. The advantages of the present invention include improved optical efficiency and accuracy by minimizing the voltage variation of electrode and control wire by each other and electrostatic force between control wire and micromirror.