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发明名称
Verfahren zur Ausbildung von Trench-Speicherzellenstrukturen für DRAMs
摘要
申请公布号
DE102004028852(B4)
申请公布日期
2007.04.05
申请号
DE200410028852
申请日期
2004.06.15
申请人
INFINEON TECHNOLOGIES AG
发明人
KRASEMANN, ANKE
分类号
H01L21/8242
主分类号
H01L21/8242
代理机构
代理人
主权项
地址
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