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发明名称
STRAINED SILICON-ON-INSULATOR BY ANODIZATION OF A BURIED P+ SILICON GERMANUM LAYER
摘要
申请公布号
KR20070037483(A)
申请公布日期
2007.04.04
申请号
KR20077000058
申请日期
2005.05.27
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
ADAM THOMAS N;BEDELL STEPHEN W.;DE SOUZA JOEL P.;FOGEL KEITH E.;REZNICEK ALEXANDER;SADANA DEVENDRA K.;SHAHIDI GHAVAM
分类号
H01L27/12;H01L21/20;H01L21/762
主分类号
H01L27/12
代理机构
代理人
主权项
地址
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