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经营范围
发明名称
Vacuum processing apparatus and operating method therefor
摘要
申请公布号
EP1079418(B1)
申请公布日期
2007.04.04
申请号
EP20000121401
申请日期
1991.08.19
申请人
HITACHI, LTD.
发明人
KATO, SHIGEKAZU;TSUBONE, TSUNEHIKO;NISHIHATA, KOUJI;ITOU, ATSUSHI
分类号
H01L21/00;B01J3/00;B41J2/36;B41J2/365;C23C14/56;H01L21/677
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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