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经营范围
发明名称
X-ray microscopic inspection apparatus
摘要
申请公布号
EP1679733(A3)
申请公布日期
2007.04.04
申请号
EP20060001612
申请日期
2004.01.23
申请人
TOHKEN CO., LTD.
发明人
YADA, KEIJI;KAI, HIROMI;SAITO, YASUKI
分类号
G21K7/00;G01N23/04;H01J35/14;H01J37/063;H05G1/02
主分类号
G21K7/00
代理机构
代理人
主权项
地址
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