| 摘要 |
A microscope which comprises: an optical system for magnifying a sample; a focus adjuster for adjusting a focus of the optical system on the sample; an optical detector for detecting light through the optical system; a position estimator for estimating a position of the focus of the optical system, which stays with respect to the sample, based on the light detected by the optical detector while the optical system is vibrating with respect to the sample; and a controller for controlling the focus adjuster based on the position of the focus estimated by the position estimator, is disclosed. An auto focusing method for a microscope is also disclosed.
|
