A METHOD FOR MAKING A SEMICONDUCTOR DEVICE HAVING AN ULTRA-THIN INSULATOR FOR INHIBITING TUNNELING EFFECTS,申请号KR20027007313-传众专利搜索

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发明名称	A METHOD FOR MAKING A SEMICONDUCTOR DEVICE HAVING AN ULTRA-THIN INSULATOR FOR INHIBITING TUNNELING EFFECTS
摘要
申请公布号	KR100702694(B1)	申请公布日期	2007.04.04
申请号	KR20027007313	申请日期	2002.06.07
申请人		发明人
分类号	H01L21/336	主分类号	H01L21/336
代理机构		代理人
主权项
地址

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