| 发明名称 |
SYSTEMS AND METHODS FOR MANUFACTURING GRANULAR MATERIAL, AND FOR MEASURING AND REDUCING DUST IN GRANULAR MATERIAL |
| 摘要 |
The invention is directed to an apparatus for reducing dust in granular polysilicon. The system includes a process vessel having a vacuum port for pulling dust from the polysilicon. |
| 申请公布号 |
EP1768927(A2) |
申请公布日期 |
2007.04.04 |
| 申请号 |
EP20050747497 |
申请日期 |
2005.05.11 |
| 申请人 |
MEMC ELECTRONIC MATERIALS, INC. |
发明人 |
HOLDER, J.D.;SREEDHARAMURTHY, H.;HILKER, J.D. |
| 分类号 |
C01B33/027;C30B15/00;C30B21/06;C30B30/04 |
主分类号 |
C01B33/027 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
