发明名称 POROUS SUBSTRATE WITH SMOOTH SURFACE AND PRODUCTION METHOD THEREOF
摘要 <p>The porous substrate, comprises: three-dimensional-network skeletal solid phase inside the substrate, and a skin layer same in quality as the skeletal solid phase formed on at least one surface of the substrate, and a production method thereof, comprising: forming a wet gel having a three-dimensional-network skeletal solid phase and a fluid phase rich in solvent that are separated from each other in a space between a pair of flat plates by sol-gel reaction, removing the solvent in the wet gel by drying, and removing at least one flat plate of the pair of flat plates.</p>
申请公布号 KR20070037369(A) 申请公布日期 2007.04.04
申请号 KR20060095265 申请日期 2006.09.29
申请人 KABUSHIKI KAISHA KOBE SEIKO SHO;KYOTO UNIVERSITY 发明人 HIRANO TAKAYUKI;KAWAKAMI NOBUYUKI;TANAKA TAKEHARU;SUZUKI TETSUO;FUKUMOTO YOSHITO;NAKANISHI KAZUKI;KANAMORI KAZUYOSHI
分类号 H01L21/84;C01B33/152 主分类号 H01L21/84
代理机构 代理人
主权项
地址